Micro and Nano Manufacturing facility

In 2003, As Western Michigan University (WMU) celebrated its 100th year anniversary, its Mechanical and Aeronautical Engineering Department  is  moved into a new, state-of–the-art College of Engineering and Applied Sciences (CEAS) building located on the University’s Parkview Campus, three miles south of WMU’s main Kalamazoo campus.

Dr. Muralidhar Ghantasala is the Director of the micro/nano fabrication facility with a Class 100 clean room.

Graduate students work on their projects in the Class 100 clean room facility in the College of Engineering and Applied Sciences building at WMU.

This facility has -

  • Spinner
  • Hot plates
  • Convection oven
  • Optical microscope
  • Electroplating
  • Wet etching
  • Microbalance and MA 45 Mask Aligner

Thin films laboratory

The Micro and Nano Manufacturing facility also includes a thin films laboratory which houses:

  • Dual  Magnetron Sputtering with DC/RF sputter sources
  • Thermal Evaporation system
  • RF Plasma  CVD  system
  • MW Plasma  CVD system
  • Etching facilities (Reactive Ion Etching), and
  • Excimer laser micromachining (for patterning, etching, and/or polymer microfluidics channel fabrication)
  • 3-D Printing (Poly Lactic Acid-PLA or ABS)


For further details or access to this facility, please contact: 
Prof. Muralidhar K. Ghantasala,   m.ghantasala@wmich.edu; Phone:  269-276-3388


Current Research Projects

Prof. Ghantasala’s current research Projects encompass the following research areas.

Torque sensors for automotive applications
Nanoparticle drug delivery systems and applications – Lab-on-chip Devices
CNT/graphene based sensors for different applications
Fuel Cell catalyst layers – Graphene oxide based materials



Prof. Muralidhar K. Ghantasala

Mr. Vivek Iddum (post graduate Research Associate)

Mr. Iqbal Chahal (Graduate Student)

Mr. Prabhjyoth Singh (Graduate Student)

Mr. Sudharsan Sridhar (Graduate Student)

Mr. Hassan Shirzadi (Doctoral Student)