Micro and Nano Manufacturing facility

Dr. Muralidhar Ghantasala is the director of Western Michigan University's micro/nano fabrication facility with a Class 100 clean room. The facility is housed in Floyd Hall, home to the College of Engineering and Applied Sciences, on WMU's Parkview Campus.


Graduate students work on their projects in the Class 100 clean room facility in the College of Engineering and Applied Sciences building at WMU.

This facility includes the following equipment:

  • Spinner
  • Hot plates
  • Convection oven
  • Optical microscope
  • Electroplating
  • Wet etching
  • Microbalance and MA 45 Mask Aligner

The micro- and nano-manufacturing facility also includes a thin films laboratory which houses:

  • Dual  Magnetron Sputtering with DC/RF sputter sources
  • Thermal Evaporation system
  • RF Plasma  CVD  system
  • MW Plasma  CVD system
  • Etching facilities (Reactive Ion Etching), and
  • Excimer laser micromachining (for patterning, etching, and/or polymer microfluidics channel fabrication)
  • 3-D Printing (Poly Lactic Acid-PLA or ABS)

For more information

Dr. Muralidhar K. Ghantasala
Department of Mechanical and Aerospace Engineering
Western Michigan University

(269) 276-3388 | Email Ghantasala

Research Projects

Research projects encompass the following research areas.

  • Torque sensors for automotive applications
  • Nanoparticle drug delivery systems and applications – Lab-on-chip Devices
  • CNT/graphene based sensors for different applications
  • Fuel Cell catalyst layers – Graphene oxide based materials


  • Dr. Muralidhar K. Ghantasala, director
  • Vivek Iddum, post graduate research associate
  • Hassan Shirzadi, doctoral student