Micro and Nano Manufacturing facility

Dr. Muralidhar Ghantasala is the director of Western Michigan University's micro/nano fabrication facility with a Class 100 clean room. The facility is housed in Floyd Hall, home to the College of Engineering and Applied Sciences, on WMU's Parkview Campus.

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Graduate students work on their projects in the Class 100 clean room facility in the College of Engineering and Applied Sciences building at WMU.

This facility includes the following equipment:

  • Spinner
  • Hot plates
  • Convection oven
  • Optical microscope
  • Electroplating
  • Wet etching
  • Microbalance and MA 45 Mask Aligner

The micro- and nano-manufacturing facility also includes a thin films laboratory which houses:

  • Dual  Magnetron Sputtering with DC/RF sputter sources
  • Thermal Evaporation system
  • RF Plasma  CVD  system
  • MW Plasma  CVD system
  • Etching facilities (Reactive Ion Etching), and
  • Excimer laser micromachining (for patterning, etching, and/or polymer microfluidics channel fabrication)
  • 3-D Printing (Poly Lactic Acid-PLA or ABS)

For more information

Dr. Muralidhar K. Ghantasala
Department of Mechanical and Aerospace Engineering
Western Michigan University

(269) 276-3388 | Email Ghantasala

Research Projects

Research projects encompass the following research areas.

  • Torque sensors for automotive applications
  • Nanoparticle drug delivery systems and applications – Lab-on-chip Devices
  • CNT/graphene based sensors for different applications
  • Fuel Cell catalyst layers – Graphene oxide based materials

Team

  • Dr. Muralidhar K. Ghantasala, director
  • Vivek Iddum, post graduate research associate
  • Hassan Shirzadi, doctoral student