Custer Speaker Series — Dr. Benjamin Yee
"Changes in Plasma Deposition Systems for Semiconductor Manufacturing"
Open to the public, our speaker series is designed for students and community members to hear from professionals on topics that broaden attendees’ understanding of the world and add depth to experiences. It is also an opportunity for our alumni and community members to engage with our students, potential future employees.
About this talk: Advances in semiconductor devices are enabling many new technologies, from large-language models to quantum computing. Plasma-assisted deposition is a key component to such advances, as it provides the ability to deposit films with highly tunable properties at low temperatures with atomic precision. This seminar will cover the fundamentals of plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition, how these systems are engineered and the challenges that arise in developing the next generation of plasma deposition equipment. Particular attention will be paid to the realities of engineering and supporting plasma systems for high volume manufacturing.
About Dr. Yee: Dr. Benjamin Yee is a Senior Staff Plasma Physicist at Lam Research Corporation with the Source Engineering group, where he specializes in capacitively coupled plasmas, plasma metrology and plasma stability. Yee obtained his Ph.D. in Nuclear Engineering and Radiological Sciences from the University of Michigan, where he studied nanosecond discharges. He is an author or co-author on 20 peer-reviewed journal articles, received the S&T Collaborative Environment Award from Sandia National Laboratories, was a NASA Graduate Student Research Fellow, an Engineering Outreach Teaching Fellow at the University of Michigan and a Michigan Institute of Plasma Science and Engineering fellow. Prior to joining Lam Research Corporation, Yee was a Senior Member of the Technical Staff at Sandia National Laboratories, where he specialized in laser plasma diagnostics, sheath physics, and breakdown initiation. He helped found the Sandia Plasma Research Facility and was a member of the LXCat Technical Team.
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